Abstract
Nanosecond pulsed laser annealing was performed to improve optical and electrical properties of the Cu/Ag/AZO multilayer films. Different laser fluences (L) and scanning speeds (S) were selected to investigate their influences on optical transparency and electrical conductivity of the films. The results revealed that laser annealing under L = 1.0 J/cm2 and S = 10 mm/s effectively promoted grain growth in the film and caused formation of significantly enlarged particles with a more uniform distribution on the film surface. The as-obtained Cu/Ag/AZO multilayer film possessed the optimal comprehensive property with the highest figure of merit of 3.58 × 10–2 Ω−1, far outperforming the unannealed Cu/Ag/AZO multilayer film (1.92 × 10–2 Ω−1). Subsequently, this film was chosen to fabricate a transparent heater, which exhibited excellent heating performance (saturated temperature: 104.9 ℃; response time: 120 s; applied voltage: 5 V) and heating stability. Its deicing availability was also shown by a deicing test.
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