Abstract
Quantitative instrumentation has become a necessity for adequate evaluation of material properties, particularly scratch resistance and adhesion at the film-substrate interface. The nanoscratch tester is a new instrument that combines the features of both the classical stylus scratch test (normal force range) and the scanning force microscope (SFM) (short sliding distances), allowing scratch lengths of up to 10 mm. Tangential force and penetration depth are measured during the scratching process. For high-resolution inspection of the scratched area, a SFM is integrated into the system. Typical uses are presented for a range of applications, particularly on curved sample geometries and the use of scratch mapping.
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