Abstract
A two-axes nano-scanner for a scanning probe microscope (SPMs) was developed. The flexure-guided nano-scanner can move SPM samples or the probe itself along the x and y axes. The theoretical stiffness and resonant frequency of the flexure guide were obtained by using Castigliano’s theorem. An optimal nano-scanner that maximize the scanning speed under appropriate constraints was designed. The optimal results were compared with the results of a finite element analysis. The scanner performance was evaluated by using various experiments and was compared with the optimal design results. Finally, atomic force microscope images obtained by using the proposed nano-scanner are presented.
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