Abstract

Scanning Tunneling Microscope (STM) combined with Synchrotron Radiation (SR) allowed to analyze solid surfaces in real space with nanometer scale by inner-shell excitation of a specific energy level under the STM observation. Elemental analysis was successfully accomplished for Ge nano-islands on a Si(111) 7×7 surface by SR-STM. As a next step, remaining diffculties of instability and inaccuracy during measurements were improved. After renewal of a dumper system, a key to solve the diffculties was reduction of emitted electrons. Thus, an insulator-coated tip to shut out the electrons coming from a wide area was developed. Further surface analysis was performed for Cu domain on a Ge(111) 2×8 surface using the new tip. As a result, elemental analysis between Cu domains and the surrounding Ge surface was achieved. It has been shown that SR-STM provides new possibilities of nanoscale surface analysis.

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