Abstract

Nanoscale patterning has attracted considerable interest as a novel engineering technology for two-dimensional (2D) nanomaterials for various applications such as electronics, sensors, and catalysts. However, research on nanopatterning technologies that reflect the unique structural and electrical characteristics of 2D nanomaterials remains insufficient. In this study, we present a nanoscale patterning of two different polygons on layered molybdenum disulfide (MoS2), where the nanostructures are controlled by the stacking structure of MoS2. We investigate the dependence of nanopore edge stability on the stacking structure of MoS2 using density functional theory calculations and find the different geometric effects of the two nanopatterns on the band-structure modulation of semiconducting MoS2. Consistent with the theoretical calculations, we fabricate nanoporous MoS2 with hexagonal nanopores for AA’ and triangular nanopores for AB stacked MoS2 films. The AA’ MoS2 has narrow nanoribbons between the two hexagonal nanopores, resulting in a lateral quantum confinement effect, whereas the edge exposure effect is more dominant for the bandgap increase in the triangular nanoporous structure. Nanopatterns contribute to generating in-gap state of MoS2, significantly enhancing the photoelectrical characteristics of MoS2 phototransistors. Especially, the photogating effect is higher for AA’ MoS2 phototransistors with hexagonal nanoholes than AB MoS2 with triangular nanoholes. This study provides new insights into nanoscale patterning and band structure engineering of layered 2D materials for various optoelectrical applications.

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