Abstract
We have developed a novel method for nanometer-sized droplet deposition of electricallyconductive liquids based on the dynamic mode atomic force microscopy (AFM). Wesucceeded in depositing liquid droplets with a volume of ten zeptoliters or smaller and inmaking arrays of the droplets with a spacing of several tens of nanometers using the AFMcantilever with a small aperture fabricated by a focused ion beam. The liquid droplets weredeposited through the aperture by applying an electric field between the liquid and aconductive surface.
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