Abstract

High resolution imaging methods and techniques are currently under development. One of them is an extreme ultraviolet (EUV) microscopy, based on Fresnel zone plates. In this paper a compact, high-repetition, laser-plasma EUV source, emitting quasi-monochromatic radiation at 13.8nm wavelength was used in a desktop EUV transmission microscopy with a spatial (half-pitch) resolution of 50nm. EUV microscopy images of objects with various thicknesses and the spatial resolution measurements using the knife-edge test are presented.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.