Nanopowder molding method for creating implantable high-aspect-ratio electrodes on thin flexible substrates

Abstract

Metal nanoparticles and a nanopowder molding process were used to fabricate 2D and 3D patternable structures having a height-to-width ratio of up to 10:1. By means of this process, an entire neural stimulation circuit, including stimulating electrode, connection trace, and contact pad, can be fused into one continuous, integrated structure where different sections can have different heights, widths, and shapes. The technique is suitable for mass production, and the fabricated electrode is robust and very flexible. More importantly for biomedical applications, the entire fabricated structure can be packed at room temperature onto a biocompatible flexible substrate, such as polydimethylsiloxane, parylene, and polyimide as well as other temperature-sensitive or vacuum-sensitive materials. The electrodes and wires have about the same electrical resistivities as bulk materials and desirable electrochemical properties, including low impedance.