Abstract
At modern synchrotron radiation sources and beamlines, high‐precision positioning techniques present a significant opportunity to support state‐of‐the‐art synchrotron radiation research. Meanwhile, the required instrument positioning performance and capabilities, such as resolution, dynamic range, repeatability, speed, and multiple axes synchronization are exceeding the limit of commercial availability. This paper presents the current nanopositioning techniques developed for the Argonne Center for Nanoscale Materials (CNM)/Advanced Photon Source (APS) hard x‐ray nanoprobe and high‐resolution x‐ray monochromators and analyzers for the APS X‐ray Operations and Research (XOR) beamlines. Future nanopositioning techniques to be developed for the APS renewal project will also be discussed.
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