Abstract
In situ fabrication of nanostructures within a solid-polymer electrolyte confined to subwavelength-diameter nanoapertures is a promising approach for producing nanomaterials for nanophotonic and chemical sensing applications. The solid-polymer electrolyte can be patterned by lithographic photopolymerization of poly(ethylene glycol) diacrylate (PEGDA)-based silver cation (Ag+)-containing polyelectrolyte. Here, we present a new method for fabricating nanopore-templated Ag nanoparticle (AgNP) arrays by in situ photopolymerization using a zero-mode waveguide (ZMW) array to simultaneously template embedded AgNPs and control the spatial distribution of the optical field used for photopolymerization. The approach starts with an array of nanopores fabricated by sequential layer-by-layer deposition and focused ion beam milling. These structures have an optically transparent bottom, allowing access of the optical radiation to the attoliter-volume ZMW region to photopolymerize a PEGDA monomer solution containing AgNPs and Ag+. The electric field intensity distribution is calculated for various ZMW optical cladding layer thicknesses using finite-element simulations, closely following the light-blocking efficiency of the optical cladding layer. The fidelity of the polyelectrolyte nanopillar pattern was optimized with respect to experimental conditions, including the presence or absence of Ag+ and AgNPs and the concentrations of PEGDA and Ag+. The self-templated approach for photopatterning high-resolution photolabile polyelectrolyte nanostructures directly within a ZMW array could lead to a new class of metamaterials formed by embedding metal nanoparticles within a dielectric in a well-defined spatial array.
Highlights
The increasing utilization of micro- and nanostructured devices in chemical sensing and nanophotonic applications has created a need for precise spatial, temporal, and geometric control over the formation of nanoscale systems
This study indicates that: (1) metal zero-mode waveguide (ZMW) arrays may be used to template the nanopillars for the polymerization process; (2) the ZMW can be tuned to control the spatial distribution of the confined optical field and, of the photopolymerization process; and (3) these properties can be realized in the presence of nanopore-embedded Ag nanoparticle (AgNP) and Ag+ ions in the electrolyte
Encouraged by the subwavelength control of the radial and axial field distributions provided by the ZMWs, we extended the fabrication of recessed aligner irradiating the bottom (Ag ring) electrode array to include AgNPs and Ag+ embedded in the photopolymerized poly(ethylene glycol) diacrylate (PEGDA)
Summary
The increasing utilization of micro- and nanostructured devices in chemical sensing and nanophotonic applications has created a need for precise spatial, temporal, and geometric control over the formation of nanoscale systems. Combined with patterning of polymer electrolyte composites, in situ polymer electrolyte photolithography can be used to determine the spatial composition pattern, e.g., molecular weight, degree of cross-linking, in a polymer electrolyte, in addition to physical shape (Bong et al, 2010; Wu et al, 2015). All of these techniques provide degrees of micro- and nanoscale control over polymer electrolyte’s physical/chemical properties, and geometric resolution of micro- and nanostructures on multiple length scales
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