Abstract
We present an integrated platform for single-molecule electrochemical analysis in which solid-state nanopore sensors are post-fabricated into a custom CMOS preamplifier die. The usable bandwidth of solid-state nanopore sensors is typically constrained by noise caused by parasitic impedances from the sensor's support substrate and external measurement electronics. By integrating the sensor with a dedicated amplifier we provide a path to significantly reduce these parasitics. The new system includes a low-noise 8-channel preamplifier in a 0.13µm CMOS process. The chip is post-processed to fabricate Ag/AgCl microelectrodes and silicon nitride nanopores.
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