Abstract
Nanopits in the diameter of sub-hundred and hundreds of nanometres were generated under different voltage magnitudes by conductive atomic force microscope (CAFM) electric lithography method in ambient environment. The pit lithography was conducted through applying conductive probe to measure the I-V curve during AFM contact state. The pit patterns were generated at the position beneath the tip along the I-V curve measurement process. By comparing the geometry sizes of the formed nanopits and their process current evolution under different bias voltages, the nano-machining phenomenon of CAFM electric point lithography was studied and the nanoscale electrical breakdown was suggested as the possible mechanism besides the local anodic oxidation in the high voltage range.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.