NANOPARTICLE SYNTHESIS BY THE PECVD METHOD BASED ON RF DISCHARGE

Abstract

This scientific paper presents the results of the study of the synthesis of carbon nanoparticles in radio-frequency ( RF ) discharge plasma at low pressures in a vacuum apparatus. The growth of carbon nanoparticles was studied under different plasma parameters, such as variation of self-displacement voltage, temperature, and discharge power. The experiment was performed in the pressure range of 0.5-1.1 mbarr and powers of 6-20 W. The results showed that the synthesis time of carbon nanoparticles, including their formation and growth, depends on the plasma parameters. Small changes in temperature, pressure, and plasma power can significantly change the growth and formation of nanoparticles. An important conclusion of this work is that increasing the temperature of the plasma-forming gas leads to an increase in the formation time of carbon nanoparticles. The dependences of nanoparticle growth on the discharge power, selfdisplacement voltage on the discharge pressure, and temperature on the discharge power were also obtained. The results obtained provide valuable information for understanding and controlling the synthesis process of carbon nanoparticles in the plasma environment. This is important for various technological applications, including nanoelectronics and catalysis.