Abstract
AbstractIn this presentation, we discuss the development of nanostructured sensor materials based on nanoparticulate metal-oxide suspensions deposited onto MEMS μHPs by microprinting. The preparation of the suspensions is described; the precise control over the thickness of the films through the composition of the metal-oxide suspensions is demonstrated. The procedure of microprinting is described. The deposited films are evaluated as chemical sensors. The sensor performance of the microsensors – sensitivity, stability, speed of operation, and selectivity – is compared with that of analogous traditional thick-film sensors.
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