Abstract
Questions related to metrological assurance of measurements of the roughness and relief parameters of nanostructured surfaces are considered. On the basis of an analysis of current developments in the area of scanning probe microscopy, a description of the physical and technical characteristics of different types of instruments for measurements in the nanodimensional range is given and the traceability of these characteristics to standards of the unit of length is demonstrated.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
