Nanometre-accurate form measurement machine for E-ELT M1 segments

Abstract

To enable important scientific discoveries, ESO has defined a new ground-based telescope: the European Extremely Large Telescope (E-ELT). The baseline design features a telescope with a 39-m-class primary mirror (M1), making it the largest and most powerful telescope in the world. The M1 consists of 798 hexagonal segments, each about 1.4m wide, but only 50mm thick. In the last stages of the manufacturing process of these M1 segments, a nanometre-accurate metrology method is required for the M1 to be within specifications. The segments have to be measured on their whiffle-tree support structures with a nanometre-level uncertainty, with a total budget on form accuracy of 50nm RMS for any segment assembly. In this paper a measurement machine design is presented based on a non-contact single-point scanning technique, capable of measuring with nanometre accuracy, being universal, fast and with low operational costs, providing suitable metrology for M1 segments. A tactile precision probe is implemented to be able to use the machine in earlier stages of the segment manufacturing process. In particular, this paper describes the design of the air-bearing motion system and the separate metrology system based on a moving Sintered Silicon Carbide tube, a fixed Zerodur metrology frame and an interferometric system for a direct and short metrology loop. Preliminary calculations show nanometre-level measurement uncertainty after calibration.