Nanometer-scale accuracy electrochemical micromachining with adjustable inductance

Abstract

Electrochemical micromachining technique using ultra short pulses can increase machining resolution. However, the pulse duration is the only effective control parameter of the machining resolution. Here, we propose a controlled electrochemical micromachining technique. We added an adjustable inductance element in the equivalent circuit of the electrochemical micromachining to form a coupled fluid-electric circuit. The machining resolution depends on both local separation between the electrodes and the adjustable inductance. So, the adjustable inductance can be taken as another effective control parameter of the machining resolution. As the inductance increases, the large polarization voltage can be more easily confined to the electrode regions in very close proximity. This technique was used for machining some micro structures, and a nanometer scale machining resolution was achieved easily when an ordinary pulse source is used.