Abstract
In modern scanning transmission electron microscopes, equipped with a field emission gun and operating at 100–200 keV, a probe current of 1 nA in a 1 nm spot is obtainable. The sample to be studied is then immersed in a strong magnetic field. We have demonstrated the possibility to energy-analyze the electrons, emitted from the surface, with high detection efficiency. For thin samples, the option of measuring the energy loss of the transmitted electron is maintained. By detecting the energy loss electron in coincidence with the emitted electron [F.J. Pijper and P. Kruit, Phys. Rev. B 44 (1991) 9192] a new high spatial resolution mode of analysis comes available, comparable to X-ray generated Auger spectroscopy and photoelectron spectroscopy [F.J. Pijper et al., Scanning Microsc. 3 (1989) 65].
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