Abstract
Micromechanical resonators are very useful for detection of magnetic torque. We have developed nanoscale torsional resonators fabricated within silicon nitride membranes, as a platform for magnetometry of nanoscale magnetic elements. We describe the rotational magnetic hysteresis of a 10 nm thick film deposited on a resonator, and a study of magnetic hysteresis in a single, 1 μm diameter permalloy disk. The torsional resonator is patterned using a dual beam scanning electron/focused ion system. For the 1 μm diameter disk, it is found to be possible to tune the conditions such that an apparent magnetic supercooling of vortex nucleation is observed, as would be suggested by the modified Landau theory of the C- to vortex-state switch as a first-order phase transition. Complementary transmission electron and Lorentz microscopy of the same structures have also been performed.
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