Abstract
In this paper, we study the correlation between crystalline structure and nanomechanic properties of iron thin films grown on CaF 2(111)/Si(111) as a function of deposition temperature. The results show a dependence of in-plane residual strain with hardness and nanoscratch measurements. The nanoindentation results show an increase of staircase behavior upon increasing deposition temperature, indicating a correlation of film crystal quality with mechanical behavior. From a structural point of view, Fe films deposited at 450°C are of the best quality. The biggest nanoscratch resistance was shown by a sample deposited at 150°C, which has larger hardness and better adhesion.
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