Abstract
Nanolithography and its techniques have almost crossed all the barriers from the previous years and are developing day by day. The patterning techniques can be easily done now without the use of masks are a big aid in the field of Nano-manufacturing. This review article throws more light on the alternate Nanolithographic techniques such as Micro-Contact Printing, Nano-Imprint Lithography and Scanning Probe Lithography and its process. The advantages, disadvantages, applications and recent advancements of each technique are also mentioned. Nano-Imprint Lithography and Scanning Probe Lithography are further subdivided into numerous techniques. The alternate techniques of Nanolithography can be done easily and cost effectively and produces excellent resolution images compared to UV and X-Ray Lithographic techniques.
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