Abstract
We demonstrate a novel atomic layer deposition (ALD) process to make high quality nanocrystalline titanium dioxide (TiO<sub>2</sub>) and zinc oxide (ZnO) with intermediate Al<sub>2</sub>O<sub>3</sub> layers to limit the crystal size. The waveguide losses of TiO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> nanolaminates measured using the prism coupling method for both 633 nm and 1551 nm wavelengths are as low as 0.2 ± 0.1 dB/mm with the smallest crystal size. We also show that the third-order optical nonlinearity in ZnO/Al<sub>2</sub>O<sub>3</sub> nanolaminates can be enhanced by nanoscale engineering of the thin film structure.
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