Abstract
The nanoindentation-induced phase transformation behavior of silicon at elevated temperatures(25–150 °C) has been studied. Nucleation of Si-III/Si-XII on unloading is enhanced withincreasing temperature and at the highest temperatures in an amorphous Si matrix,occurs in a continuous fashion without a pop-out event. Interestingly, for slowunloading at the highest temperatures, formation of Si-III/Si-XII in a crystalline Simatrix was not observed. Elevated temperatures enhance the nucleation of Si-IIIand Si-XII during unloading but the final composition of the phase transformedzone is also dependent on the thermal stability of the phases in their respectivematrices.
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