Nanoimprinted SU-8 Nanopillars and Hierarchically Branched Nanowires by Anodic Aluminum Oxide Templates and Their Optical Properties

Abstract

We fabricated well-dispersed SU-8 nanopillars and hierarchically branched nanowires using nanoimprinted method. Anodic aluminum oxide (AAO) templates with branched pore structures were used as templates. We successfully fabricated high density, large aspect ratio, large area SU-8 patterns. It provides a convenient and powerful approach to produce complicated nanostructures on SU-8 photoresist. The optical reflectivity was measured to characterize the SU-8 surface. Unique optical properties could be observed from these SU-8 nanopillar structures.