Abstract
Sets of Cr-based hard coatings were prepared via reactive closed field unbalanced magnetron sputtering (CFUBMS). Substrate temperature was kept in range of 150 to 200ºC during deposition. Nanohardness (H) andeffective modulus of elasticity (E*) of the CrN, CrAlN, CrTiN and CrTiAlN coatings were examined using depth-sensing indentationmethod. The results from the combined examination of the research ratios showed that the triple and quaternary hard coatings have superior mechanical properties and they strongly depend on the deposition conditions
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