Abstract
Nanogrinding was performed on the cross-sections of amorphous Si thin film solar panels, which are nanoscale multi-layer structures consisting of hard and brittle materials. The deformed structures of the panel cross-sectional surfaces after grinding were investigated using electron and atomic force microscopy. The nanogrinding results were compared with those obtained from polishing and nanoscratching, demonstrating that the three processes had produced consistent surface characteristics. Though nanogrinding produced nanometric surface roughness with ductile material removal, but could cause cracking, edge chipping and delamination at thin film interfaces. The results of this work are of value for developing the efficient machining process for thin film solar panels and other brittle multi-layer materials.
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