Abstract
A kind of array micro-electromechanical systems (MEMS) cantilever of biochip is designed, which integrated capacitive pressure sensor. Before and after hybridization reaction, by the change of capacitance value, it can measure the capacitance values through integrated circuit (IC) to judge whether the solution containing the cantilever probe genes. In order to improve the detection sensitivity, it aggravate cantilever by gold nanoparticles combining hybridization information, applying Au-S chemical bond of gold nanoparticles and dithiol HS(CH2)6SH to combine and fix DNA probes and applying target DNA marked with biotin to combine gold nanoparticles by Biotin - Streptavidin combining. The results shows that this biochip can detect biological samples fast, high throughput, low cost, high sensitivity and reliably.
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