Nanofabrication Process for Highly Ordered Porous Materials by the Liquid Phase Deposition Methods

Abstract

We have studied a novel technique for the direct synthesis of two-dimensional metal oxide films with highly ordered periodic structure. TiO2 films with highly nano-ordered architectures were directly deposited on substrates at room temperature by the liquid phase infiltration (LPI) method. 2D arrays of several kinds of metal oxide rods with diameters ranging from ca. 100 to 1000 nm are fabricated by filling the holes in a Si wafer. We summarized the various kinds of ordered structured metal oxide thin film with this method and the other techniques which have been reported that a novel soft solution process for the direct synthesis of large-area well-crystallized oxides with 1D-3D ordered periodic structure has been developed based on the LPI method. Metal oxide thin films were deposited directly into the nano-space, and thus the nano-space was completely infiltrated with metal oxide. The LPI process provides a direct fabrication route for metal oxide films with highly ordered structures, enabling nanoscale modification of optical properties of photonic crystals.