Abstract
The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.
Highlights
Two-dimensional (2D) materials have excellent material properties for sensor applications due to their large surfaceto-volume ratio and unique electrical, mechanical, and optical properties [1, 2]
We present suitable transduction mechanisms that are of particular relevance to NEMS sensors and review the state of the art in 2D membrane-based NEMS sensor applications, discussing pressure sensors, accelerometers, oscillators, resonant mass sensors, gas sensors, Hall effect sensors, and bolometers
While the field of silicon-based MEMS sensors is getting mature, the advent and discovery of 2D materials have brought us a set of nanomaterials for realizing novel NEMS sensors. Are these new materials thinner than any currently available Complementary Metal Oxide Semiconductor (CMOS) or MEMS material, allowing drastic reductions of device size and enhanced sensitivity, there is a larger range of materials emerging with exceptional properties
Summary
Two-dimensional (2D) materials have excellent material properties for sensor applications due to their large surfaceto-volume ratio and unique electrical, mechanical, and optical properties [1, 2]. The potential of 2D materials for sensing has been further extended by freely suspending 2D materials to form atomically thin membranes, ribbons, or beams [3,4,5,6] These types of suspended 2D material structures enable a new class of 2D suspended NEMS sensors, which is the focus of the present review. We present suitable transduction mechanisms that are of particular relevance to NEMS sensors and review the state of the art in 2D membrane-based NEMS sensor applications, discussing pressure sensors, accelerometers, oscillators, resonant mass sensors, gas sensors, Hall effect sensors, and bolometers. This latter part of the paper is organized by application, not by material
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