Abstract
Subnanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated nanoelectromechanical in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 pm/ for a low laser power of 85 μW and a repeatability of 2 nm after five cycles of operation as well as good long-term stability, this new detection principle provides a reliable alternative for overcoming the current position detection limit in a wide variety of research and application fields.
Highlights
Subnanometer displacement detection lays the solid foundation for critical applications in modern metrology
We presented a NEMS-Position-sensitive detectors (PSDs) based on silicon nitride trampoline resonators with integrated electrodynamic readout and actuation
We demonstrated a sensitivity of 4 pm/ Hz with the potential of further optimization by using, for example, silicon nitride with lower stress
Summary
Subnanometer displacement detection lays the solid foundation for critical applications in modern metrology. Similar nanoelectromechanical resonators have demonstrated unprecedented sensitivity for radiation[15] as well as single nanoparticle and molecule absorption detection.[16−18] The NEMS-PSD principle is based on the highly beam-position-dependent photothermal heating of plasmonic Au nanoparticles that are placed on top of a silicon nitride trampoline resonator, as schematically. Due to the Gaussian power distribution of the beam, the displacement of the laser beam changes the power absorbed by the nanoparticles, resulting in a detectable frequency shift of the temperature-sensitive nanoelectromechanical resonator.
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