Abstract
(111), (110) Cd0.96Zn0.04Te, and (111) Cd0.9Zn0.1Te single crystals were lapped and polished by Al2O3 powder and SiO2 nanosphere, respectively. The ultrasmooth and damage-free surface with Ra of 1.96 nm is achieved. The nanocutting process was conducted by a Berkovich indenter. When a cutting speed is 10 µm/s and applied load is 10 µN, the surface roughness Ra of (111) Cd0.96Zn0.04Te is 0.22 nm. The results show that lapping, chemical mechanical polishing, and nanocutting composite process is suitable for the machining of soft brittle materials.
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