Abstract
Sensitive porous tungsten oxide nano-crystalline based NO 2 sensor was fabricated by thin film microfabrication technique. The sensitivity of this NO 2 sensor was at parts per billion (ppb) level. The nano-crystalline porous tungsten oxide film was prepared from WCl 6 by a sol–gel technique. The surface morphology and sensitivity to NO 2 of the tungsten oxide films calcined at various temperatures were investigated. The NO 2 adsorption behavior on the tungsten oxide surface was carried out by XPS measurement. Experimental results indicated that the tungsten oxide film calcined at 550 °C for 1 h showed the best performance as a sensing material to NO 2, and the optimal operational temperature of the sensor was 300 °C. The sensor showed high sensitivity to low NO 2 concentration in the range from 50 to 550 ppb with relatively fast response time (∼3 min) and recovery time (∼1 min), respectively.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
