Abstract
Nanocrystalline silicon (nc-Si:H) grown by hot-wire chemical vapor deposition (HWCVD). We report on the effects of B2H6 doping ratio on the microstructural and optoelectrical properties of the p-type nc-Si:H thin films grown by HWCVD at low substrate temperature of 200 °C. An attempt has been made to elucidate the boron doping mechanism of the p-type nc-Si:H thin films deposited by HWCVD and the correlation between the B2H6 ratio, crystalline volume fraction, optical band gap and dark conductivity. Characterization of these films from Raman spectroscopy revealed that the high conductive film consists of mixed phase of nanocrystalline silicon embedded in an amorphous network. A small increase in B2H6 doping ratio showed marked effect on film microstructure. At the optimal condition, high dark conductivity (8 S/cm) with high optical band gap (~2.0 eV) was obtained.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
