Nanocrystalline Er:YAG thin films prepared by pulsed laser deposition: An electron microscopy study

Abstract

We report the synthesis of well crystallized stoichiometric Er:YAG thin films by pulsed laser deposition from Er:YAG targets in low pressure oxygen, followed by a post-deposition treatment at 1400 °C in environmental air for 19 h. The structure and morphology of the films were examined by transmission electron microscopy and selected area electron diffraction. We demonstrated that the subsequent application of pulsed laser deposition and heat treatment resulted in the formation of well crystallized single phase cubic Er:YAG nanostructured coatings.