Abstract
Nanocrystalline copper oxide (CuO) thin films were deposited onto glass substrates by a spin coating technique using an aqueous solution of copper acetate. These films were characterized for their structural, mor-phological, optoelectronic properties by means of X-ray diffraction (XRD) scanning electron microscopy (SEM), UVspectroscopy and four probe method. The CuO films are oriented along (1 1 1) plane with the monoclinic crystal structure. These films were utilized in H2S sensors. The dependence of the H2S response on the operating temperature, H2S concentration of CuO film (annealed at 700。C) was investigated. The CuO film showed selectivity for H2S. The maximum H2S response of 25.2 % for the CuO film at gas concentra-tion of 100 ppm at operating temperature 200oC was achieved.
Highlights
The recent emergence of concern over environmental pollution and accidental leakages of explosive gases have increased awareness for efficient detection and constant monitoring of such gases
It is concluded that all the films were polycrystalline with a monoclinic structure and a random orientation, which generally occurs in the growth of CuO thin films [21]
The average CuO thin film particle sizes were calculated using the full width at half maximum (FWHM) of (111) peak from the Debye Scherer’s formula
Summary
The recent emergence of concern over environmental pollution and accidental leakages of explosive gases have increased awareness for efficient detection and constant monitoring of such gases To meet this demand, considerable research into the development of sensors with novel design using tailored material properties is underway. Metal oxides possess a broad range of electrical, chemical and physical properties that are often highly sensitive to changes in their chemical environment Because of these properties, metal oxides have been widely studied and most commercial sensors are based on appropriately structured and doped oxides [1] The enhancement in the gas sensing performance of metal oxides by electron [2], ultraviolet [3] and plasma [4] irradiations was due to the modified surface structure. The gas sensing performance of CuO thin films was studied at different operating temperatures and gas concentrations
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