Abstract
Nanostructural carbonaceous-palladium (C-Pd) films for ammonia sensing were studied. These C-Pd films were prepared in a two-step process: the first one involved physical vacuum deposition (PVD) and the second one chemical vacuum deposition (CVD). The structure and morphology of the obtained films were characterized with the use of Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM). Measurements of ammonia sensing showed that resistivity of the film changes with ammonia content in ambient atmosphere.
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