Abstract
Nanocavities formed by neon Plasma Based Ion Implantation (PBII) in Si have been studied in comparison with conventional ion implantation (CI). Interstitial-type defects are also investigated. To avoid amorphisation, neon implantations were performed at 250°C with a fluence of ≈5×1016cm−2. Using PBII a rather uniform layer of cavities is observed from the surface while a three layer structure is present using the CI. However, the mean diameter of cavities is smaller due to the interaction with the interstitial-type defects. After annealing at 800°C, bubbles grow and extended defects identified as {113} defects are formed.
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