Nanobits: customizable scanning probe tips

Abstract

We present here a proof-of-principle study of scanning probe tips defined by planar nanolithographyand integrated with AFM probes using nanomanipulation. The so-called ‘nanobits’ are 2–4 µm long and 120–150 nmthin flakes of Si3N4 or SiO2, fabricated by electron beam lithography and standard silicon processing. Using amicrogripper they were detached from an array and fixed to a standard pyramidal AFMprobe or alternatively inserted into a tipless cantilever equipped with a narrow slit.The nanobit-enhanced probes were used for imaging of deep trenches, withoutvisible deformation, wear or dislocation of the tips of the nanobit after severalscans. This approach allows an unprecedented freedom in adapting the shape andsize of scanning probe tips to the surface topology or to the specific application.