Abstract
Stacks of the three elements, copper, indium and selenium deposited at different temperatures (RT — 400°C) and annealed at 450°C for 30 mn were analyzed in a transmission electron microscope with electron diffraction and energy dispersive spectroscopy. The chalcopyrite CuInSe 2 phase was mainly obtained and identified by diffraction and nanoanalysis. The homogeneity of the layers was checked by using a spot size of 25 nm to analyze individual grains. Some deviations from the ideal composition were observed. The composition of some areas could be explained by considering them as a mixture of secondary phases.
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