Nano-Accuracy Surface Figure Metrology of Precision Optics

Abstract

Precision optical surface figure measurement is the most important aspect for optical systems development of telescopes, microscopes, cameras and imaging or focusing systems. Any optical surface slope error or surface figure error departure from the theoretical surface will produce beam deviations according to Snell’s law (law of refraction) for transmission optics or to the law of reflection for mirrors. Beam deviations can be easily calculated by use of ray tracing methods. The deviated beam will blur the image quality, enlarge the focus point, degrade the accuracy of the wave-front, and harm the performance of the optical system. To avoid such errors, surface figure must be manufactured and measured precisely.