Nano Texturing and Self-Organization Process for Development of Optical Functional Surface

Abstract

A new fabrication process for an optical resonator is developed by means of a combination of surface texturing using nano plastic forming and self-organization using thermal dewetting. Process conditions are optimized to fabricate an optical resonator that has a double-layer Au nanorod array. The nanorods are 450 nm in length and 150 nm in width. The extinction spectrum of the double-layer nanorod array is measured to evaluate its optical characteristics. It is found that the measured extinction peak corresponds to the theoretical resonant wavelength of a parallel nanorod resonator. It is expected that the developed double-layer nanorod array can be utilized to generate the negative refractive index of metamaterial.