Abstract
We have developed a novel microfabrication method by combining a microwave plasma treatment with a reactive ion etching (RIE) method. First, the RIE system was used for fabricating whiskers of single crystalline diamond. Then, the whiskers were exposed to microwave plasma of hydrogen gas. As a result, we have successfully fabricated a nano-scale diamond rod of the single crystal, which has the crystalline facets. The sizes of the ‘nano-rods’ were 50–200 nm in thickness and several microns in height. Morphology of the nano-rods could be controlled by changing the crystal orientation of the diamond substrate.
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