Abstract

Highly transparent nano-diamond (NCD) and diamond-like carbon (DLC) films are produced by Micro-Wave PECVD and Radio-Frequency magnetron sputtering, respectively for comparative study on application perspective, as antireflection coating (ARC) for silicon solar cells. Considering application of ARC on the already fabricated top electrode of solar cells, the typical synthesis techniques are selected on the basis of their advantages of being the low temperature processes. Optical band-gap (Eg), transmittance, reflectance, ID/IG ratio in Raman spectra and sp3-fraction of the films have been estimated and the magnitude of refractive index has been optimized between that of air (n= 1) and Si (n= 3.4), satisfying the basic requirement. Economic development of commercially viable ARC-grade NCD and DLC films are developed for Si solar cells without any external heating of the substrates.

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