Abstract
In 2011 Croatian National Laboratory for Length (HMI/FSB-LPMD) developed calibration standards which have been physically implemented in cooperation with the company MikroMasch Trading OU and the Ruđer Boskovic Institute. Specific design of standards makes them suitable for calibration of optical instruments, stylus instruments, scanning electron microscopes, atomic force microscopes and scanning tunnelling microscopes. Therefore, the developed calibration standards greatly contribute to the reproducibility of measurement results for groove depth well as the 2D and 3D roughness parameters obtained by various measuring methods. After a number of measurements conducted on developed standards, based on which new knowledge was acquired, HMI/FSB-LPMD designed a new standard for the field of dimensional nanometrology. This paper presents the design of a new standard that is still suitable for calibration of different types of measuring instruments, i.e. methods, but has a larger measurement capability in terms of measuring ranges in vertical and lateral direction.
Highlights
In 1986 first roughness reference standards made of silicon were produced at the Laboratory for precise measurements of length (LFSB), which is a part of Croatian Metrology Institute (HMI) designated as HMI/FSB-LPMD
Due to world-class quality of these standards and their outstanding metrological characteristics, they were used in several European countries; among others, standards are currently being used as roughness reference standards in Italy, Slovenia, Croatia and Serbia
HMI/FSB-LPMD has a long tradition in design of roughness calibration standards
Summary
In 1986 first roughness reference standards made of silicon were produced at the Laboratory for precise measurements of length (LFSB), which is a part of Croatian Metrology Institute (HMI) designated as HMI/FSB-LPMD. Because of very positive experience with the existing HMI/FSB-LPMD roughness reference standards, it was decided to use them as the basis for the development of a new calibration standard. In order to include as many measuring instruments, i.e. measurement methods in this research, HMI/FSB-LPMD launched EURAMET Project 1012, Limitations of Methods for Measuring Groove Depth. Based on the requirements for calibration standards from the overview published by PTB [4, 5], as well as from measurement results obtained within EURAMET Project 1012 [6], a model of new calibration standard has been proposed
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