Nano- and micro-technology applications of focused ion beam processing

Abstract

Advances in focused ion beam technology including higher current density, finely focused beams under computer control are making micrornachining an excellent prototyping route for devices and a commercial possibility for production. This paper concentrates on new applications of focused ion beam processing in Si based microdevices and in sensors, including high-resolution patterning of YBaCuO superconducting Josephson junction devices.