NaCl-assisted chemical vapor deposition growth of MoSe2 and MoSe2/h-BN heterostructure

Abstract

As a typical two-dimensional (2D) transition metal dichalcogenides (TMDCs), MoSe2 has attracted lots of interest due to its electronic and optical properties in recent years. The controllable synthesis of 2D MoSe2 and its heterostructure is of considerable importance for achieving diverse applications. Herein, we realized the controlled growth of MoSe2 by atmospheric pressure chemical vapor deposition (APCVD) method through using NaCl as the promoter. Raman and photoluminescence (PL) spectroscopy have been used to investigate the optical properties of MoSe2 domains with different layers. The dependence of structures on synthetic parameter is systematically investigated by tuning the growth conditions. On this basis, the monolayer MoSe2 was constructed on CVD-grown hexagonal boron nitride (h-BN) by an all-CVD approach. Detailed characterizations indicate that MoSe2 deposited on h-BN exhibits improved optical properties as compared to those on SiO2/Si. Our results could enrich the understanding for growth of TMDCs, advocating further investigation of their intrinsic properties and a variety of device applications.