Abstract
A nude type inverted magnetron gauge which consists of an anode, pole pieces, and a cathode with a thin vacuum chamber containing a magnet is developed. Relatively good uniformity of the magnetic flux density in the central space of the cathode is obtained. The discharge current vs pressure characteristics are measured over a wide pressure range of 10-8 to 10-2 Pa. It is found that the gauge shows good linearity in the discharge current vs pressure plot in the range 10-8 to 10-2 Pa. However, the characteristic curves typically show an abrupt change of slope at 10-5 Pa. Sudden change in the discharge current, as found for a planar magnetron or a cylindrical magnetron with a magnet inside the cathode, is not observed when the pressure is varied.
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