Abstract
This review paper describes the present status of passivation films with organic/Inorganic multilayer structure on flexible organic film substrate designed for electronic devices such as organic light emitting diode (OLED). Passivation film of SiNx/CN:H multilayer showed an excellent barrier properties for water and oxygen and strongly suppressed an appearance of dark spots on OLED surface during operation. The luminous efficiency of flexible OLED thus formed with passivation films revealed to be equivalent to that on glass substrate encapsulated by can. substrate.
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