Abstract
Parallel confocal measurement technology changes traditional simple scanning into a multi-spot scanning,and it will improve the efficiency of measurement significantly. In this paper,the working principle of confocal measurement technology is introduced and some methods to produce a parallel light source in the parallel confocal measurement are surveyed. Then,it analyzes the advantages and disadvantages of these methods. At last,it presents the latest research achievements,and describes new methods to produce the parallel light source based on the micro lens array and the Digital Micro-lens Device( DMD). By analysis of the mechanism of spatial light modulation,it establishes a laser parallel astigmatism measuring system based on a parallel light source and dual beam paths.
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