ダイヤモンドの気相合成とその析出過程

Abstract

The earliest substantial experimental work to grow diamond from gaseous phase at low pressure was disclosed by Eversole of UCC in 1962 and independently by Russian team of Derjaguin. Recently, the diamond film and particles with well-define habites were synthesized by Spitsyn and his co-warkers by the chemical transport process in a close system, but experimental details have not been reported.Independently, we have shown that the growth of diamond was feasible by hot filament assisted CVD and micro-wave plasma assisted CVD process in a gas flow system.The problems actually encountered at the diamond CVD are how to accelate thermal decomposition of hydrocarbon and how to limit the deposition of non-diamond carbon except diamond at the temperature below 1100 C. In order to satisfy these condition, it is necessary to introduce higher concentration of atomic hydrogen than equilibrium concentration related to thermal dissociation of hydrogen gas.In this paper, our experimental work to grow the diamond from gaseous phase and also the deposition process associated with atomic hydrogen are reported.